E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011

E11700 - SEMI E117 - レチクルロードポートの仕様 StdPbc-1011global Physical Interfaces and Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org200211200411 RSP Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19. 3 Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E72 Specification and Guide for 300 mm Equipment

Both user and supplier of the minienvironment shall agree upon all important parameters defined in this Test Method

• fundamental GEM requirements and

Method B is appropriate for routine process monitoring such as alignment of wafer edge grinders

The space required for pod handling per SEMI E47 is considered

such as gold (Au) films

customers of such substrates will find that these specifications are useful guides in defining their requirements

1-0702 (technical revision)

this Test Method is nondestructive

SEMI M40-0200 (first published)

No information is provided concerning the diameter of the wafer at points other than those measured

The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry

SEMI T20-0710 (Reapproved 0322)